Beam delivery techniques for radiotherapy using heavy-charged-particle beam have been reviewed. The conventional techniques using fixed-modulation SOBP (Spread-Out Bragg Peak) are described. The double scattering methods and the wobbling methods are summarized as open systems. The newly-developed conformal techniques,3D spot scanning at PSI,3D raster scanning at GSI, and broad-beam 3D irradiation method at NIRS, are introduced as a method to improve the dose localization by using the variable modulation. It is pointed out that these new systems are the closed system since the dose for each beam configuration and some beam modifying devices should be controlled during the irradiation and that high-level security system is required for highdoserate techniques. Beam delivery techniques for charged particle therapy are rapidly evolving to improve the dose localization further.