精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
論文
超精密位置決め用空気圧サーボ軸受アクチュエータ(第1報)
-システム表現に基づくアクチュエータの基本特性の提示-
平山 朋子佐々木 勝美矢部 寛
著者情報
ジャーナル フリー

74 巻 (2008) 10 号 p. 1086-1091

詳細
PDFをダウンロード (1140K) 発行機関連絡先
抄録

A pneumatic servo bearing actuator for ultraprecise positioning consisting of a servo amplifier, a pneumatic servo valve and an aerostatic bearing is proposed as a new actuator construction in this study. As the first step of the study, this report presents a system representation of the actuator on the concept of lumped-parameter bearing model and four-terminal circuit theory, where the input parameters are the pressure controlled by a servo valve and the mass flow into the bearing clearance, while the output ones are the load capacity of the bearing (thrust force of the actuator) and the bearing gap (displacement of the actuator). Fundamental characteristics of the actuator - rated thrust force, stiffness, damping coefficient and dynamic response - are presented through the system representation, and its potential to realize an ultraprecise positioning is comprehensively discussed.

著者関連情報
© 2008 公益社団法人 精密工学会
前の記事 次の記事

閲覧履歴
feedback
Top