精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
論文
走査型白色干渉顕微鏡に内蔵可能な光路差変化量のリアルタイム測定法
安達 正明藤本 健太平野 勇輝
著者情報
ジャーナル フリー

74 巻 (2008) 11 号 p. 1215-1219

詳細
PDFをダウンロード (1160K) 発行機関連絡先
抄録

We propose changing-OPD (optical path difference) measurement technique which can be built in a scanning white-light interference microscope. The technique uses a laser beam introduced around an optical axis of the interference microscope. The laser beam reflected by a reference mirror in an objective lens and the laser beam reflected by a specimen surface make interferograms at an observing plane. These interferograms are continuously captured by a high-speed CCD line camera during a vertical scanning. Changing light intensities at two pixels having different phase and different modulations are normalized as having unity amplitude, and then subtraction and sum of them are calculated. From the calculated values changing phase is calculated and then change of OPD is also calculated after every interferogram capturing. To check accuracy of the proposed technique we carried out an experiment using a precision vertical scanning stage. After a 96μm vertical scanning, total changed OPD at different portions on the specimen surface are calculated and estimated having less than 10 nm in difference.

著者関連情報
© 2008 公益社団法人 精密工学会
前の記事 次の記事

閲覧履歴
feedback
Top