超精密加工用3軸制御ファストツールサーボの開発（第2報）

－工具振動による微細溝加工の検討－

抄録

A new three-axis FTS system has been developed for ulrtaprecision machining. The 3-axis FTS unit can drive the cutting tool freely in the space by controlling the motion of the three piezoelectric actuators arranged along the three axes of the orthogonal coordinates. In order to carry out elliptical vibration cutting with the FTS unit developed, sinusoidal vibration commands are added in two directions. In this report, two methods are developed to generate the vibration command, one is to use the controller as the signal generator, and the other to add the external command signal. Series of micro groove cutting tests were carried out on Ni-P work with use of single crystal diamond cutting tool. It was proved that fine grooves without bur formation were generated by adding the circular vibration to the cutting tool. The V-shaped micro-groove array with flat ends was also machined successfully.