The spray cleaning, a cleaning method to make fine liquid particles impinge with high speed, is now often used for sheet-feed cleaning of electronic devices. Here we have taken up two typical atomizing systems for spray cleaning tools, two fluid spray and high pressure micro jet, for the purpose to explicate mechanism to obtain adequate cleaning efficiency. Practically, in order to analyze behaviors of cleaning liquid particles sprayed out of two differently structured nozzles, we measured particles diameters as well as their flying velocity and, as index to show flying state of the particles, we newly took account of indicators of cleaning liquid transfer efficiency, which we measured in both systems. Also, cleaning tests were conducted on true spherical particles of polystyrene latex stuck on glass substrates to see cleaning efficiency. As results, it is confirmed that, while cleaning efficiency is strongly relates to flying velocity of cleaning liquid particles commonly in both system, there is different characteristic specific to each atomizing structure.