Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
Fabrication Technique of Nanoimprint Mold
Jun TANIGUCHI
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Keywords: nanoimprint lithography, electron beam lithography, mold, roll mold, resist
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2010 Volume 76 Issue 2 Pages 152-155

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