Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Review
Technology for MEMS Commercialization : Current Status and Future Prospects
Renshi SAWADA, Eiji HIGURASHI
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Keywords: mems, commercialization, products, micro-sensors, micro-mirrors, micromachining, design
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2010 Volume 76 Issue 5 Pages 491-497

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