Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Lecture
MEMS Devices Serve Measurement Instrument—An Optical Beam MEMS-Scanner and Innovative Micro Cantilevers—
Masashi KITAZAWA
Author information
Keywords: MEMS-scanner, laser scanning microscopy, atomic force microscopy, micro cantilever, carbon nano fiber
JOURNAL FREE ACCESS

2010 Volume 76 Issue 5 Pages 510-513

Details
Download PDF (763K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2010 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Predecessor

Journal of the Japan Society of Precision Engineering

Journal of the Japan Society for Precision Engineering, Contributed Papers

Share this page
feedback
 Top