抄録
A high performance Nd2Fe14B/Ta thin film permanent magnet (thin film PM), which not only has a high remnant flux density and a high coercive force similar to those of conventional sintered Nd2Fe14B magnet, but also has higher heat tolerance, was developed. In this report, utilizing this high performance thin film PM, we fabricated a MEMS linear motor consisting of a moving silicon slider including 6μm thick thin film PM, a silicon linear guideway coated with DLC and a two-phased micro coil. In order to increase thrust force, the thin film PM is magnetized with a pole pitch of 0.5mm using a pulsed magnetic field generated by a meander-shaped magnetizing coil. In driving experiments, a 36mm-long stroke, maximum velocity of 1,300mm/s, maximum acceleration of 35.5m/s2 and kinetic friction coefficient of 0.14, were achieved.
