光学部品用金型加工向け超精密5軸加工機の開発

—レンズアレイ金型の高速切削加工による性能評価—

抄録

The machining of lens array mold for optics is attracting attention for fabricating camera lens modules. The profiles of axisymmetric aspheric lenses ranging from 1 to 5 mm in diameter are regularly arranged on lens array molds, allowing multiple optical lenses to be molded simultaneously. An ultra-precision machine tool for machining the lens array mold that has high-speed motion and high-accuracy positioning is needed. To solve this problem, we developed an ultra-precision 5-axis machine tool. In this paper, this machine tool was evaluated by high speed machining of the lens array mold. A surface roughness of within 2 nm and a form accuracy of within 0.1μm have been achieved using the shaper machining. The performance of the machine tool and the evaluation results for the machined mold are reported herein.