精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
論文
軸方向への力を効率良く発生できる積層可能なマイクロ空気圧アクチュエータの開発
高橋 智一清水 勇人鈴木 昌人青柳 誠司
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2015 年 81 巻 1 号 p. 74-79

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抄録
This paper proposes a small stackable pneumatic actuator achieving high output density, which is defined (output force)/(volume). The structure of actuator is a cylindrical chamber with inlet and outlet holes, which is stretchable in its axial direction. The chamber is made of flexible elastomer, which is covered by the top and bottom rigid plates made of glass and metal, respectively. The bottom plate has small holes for enhancing adhesion force to the elastomer. In the stacked actuators, the inlet and outlet holes of each chamber are serially connected, which self-assembles tubing. The practical devices were fabricated. When the pneumatic pressure of 40kPa was applied, the displacement and force of single actuator were 20μm and 1N, respectively. Those of three stacked actuator were 70μm and 1.4N, respectively. The output density was as the same order as that of a large sized Mckibben actuator, and it was 0.1 compared with a miniature sized balloon type actuator, which was caused by the smaller force than the design. The force will increase by improving the size and fabrication process of actuator.
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