精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
論文
フェムト秒レーザによるガラス材料表面へのナノ構造加工
柴田 章広金子 直人鈴木 眞哉小玉 脩平清水 純嶋田 慶太水谷 正義厨川 常元
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2015 年 81 巻 9 号 p. 862-866

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Nanostructure processing method with high productivity is desired for many practical uses. Recent studies report that femtosecond laser process is expected as one of high productive process. By irradiating femtosecond laser to the polished target surface, it is possible to form a nanostructure on laser irradiation entire area. But this method cannot be easily applied to glass substrate because this method needs to generate surface plasmon polariton by laser irradiation. Our research group invented a new method for forming a nano-sized texturing on a glass by using light absorbable metal nanoparticles and glass precursor. We made nano-sized surface structure on the glass sample, and showed the anti-reflection effect.

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