超精密位置決めステージ向け微小振動除去機構に関する研究

抄録

This paper presents a new vibration cancelling system intended for a precision positioning stage system. Machine performance of ultra-precision positioning stages for semiconductor manufacturing systems is affected by nanometer-scale vibration caused by driving noise from an actuator with high thrust force. Such nanometer-scale vibration of the stage is difficult to control only by using the driving actuator of the stage. We thus developed an active vibration cancel system with a two-degrees-of-freedom (2DOF) elastic structure in a moving table of a stage, which has high responsiveness and high stiffness. The results of a performance evaluation revealed that the developed vibration cancel system could suppress the nanometer-scale vibration of the positioning stage.