走査型電子顕微鏡 (SEM) を用いたガラスのホイールスクライブ挙動の観察

抄録

A wheel scriber that can operate in scanning electron microscope (SEM) was developed. This system enabled the microscopic observation of contact area between a scribing wheel and a glass substrate. In this study, a diamond wheel with notches on the ridge line was used for the scribing experiment. By comparison between experimental results using our scriber and a commercially available scriber (i.e. industrially used scriber), it was confirmed that the fractured surface morphology obtained by these scribers showed good agreements. For both scribers, a hackle-mark with irregular cracks appeared near the scribed surface at low applied load conditions. In contrast, a rib-mark with periodic patterns was observed under the high applied load conditions. Observation results of contact areas between wheel and glass surface provided the accurate values of contact length and penetration depth. In addition, SEM images showed the difference in crack generation behaviors around indentations formed by the notched wheel under high and low applied loads.