2022 年 88 巻 5 号 p. 402-408
The final finish of workpieces and molds with microstructures on the surface requires maintaining the global precision of entire surface. On the basis of the requirement, we investigated the precision polishing on V-shaped microgrooves carved on a plate with utilizing a magnetic compound fluid involving abrasive grains (MCF-based processing fluid). It was elucidated that the overall surfaces of the V-groove can be precisely polished while maintaining the surface profile in case DC electric field is applied in addition to a pulsed magnetic field. In contrast, the application of just DC or pulsed magnetic field induces non-polishing of the V-shaped microgrooves. The synchronous application of electric and magnetic fields is effective. Referring the result from our previous studies that the amount of polishing removal is correlated with the torque acting on the tool and inferring the experimental data of the torque characteristics on the polishing of the plate measured by viscosity-rheometer, the ER effect is a significant factor which has relation to the amount of polishing removal.
