ダイヤモンドの微細成形加工(第1報)

微細溝研磨工具の製作

抄録

For the purpose of developing precision polishing method of diamond stylus for video disc player (CED type), cutting technology of precise spiral groove on polishing plate is discussed experimentally in this paper. The groove cutting experiment is carried out using diamond cutting tools which have cutting edges with 30°, 90° or 140° included angle. The burr is generated on both corners of cut groove. The height and width of the burr are affected by the included angle of the cutting tool, cutting depth and crystal grains orientation of workpiece. For example, the burr height is 2-3 μm when the groove is cut using a diamond cutting tool having 30° included angle with 8 μm cutting depth, but, no burr is generated using the diamond cutting tool which has 140° included angle. This burr can be removed completely using a diamond cutting tool for mirror-finishing after groove cutting. This deburring method is very available to obtain desirable polishing plate for the diamond stylus. Furthermore, a diamond cutting tool wihch has 15° included angle is developed to improve the diamond stylus geometry.