In precision surface grinding, it is difficult to suppress chatter mark completely, because of unavoidable minute change in surface geometry of grinding wheel caused by wear, fracture and breakdown of abrasive grains and occurrence of minute wheel unbalance resulting from many causes. Moreover, when using horizontal-spindle hydraulic-reciprocating-table type surface grinding machines, the change of hydraulic oil temperature causes the variation of the speed and stroke of the work table and consequently the variation of chatter mark patterns. In this research, firstly, to clarify the implication of the change of chatter mark pattern in machining accuracy, the smoothing action on work surface due to geometrical multiple interference effect of a grinding wheel upon a workpiece has been discussed through numerical simulation. Secondly, to improve the machining accuracy by utilizing this effect, a device for controlling the table speed and stroke has been developed from the standpoint of practical use and its effectiveness has been investigated experimentally.