ACリニアモータと転がり案内を用いたナノメータ位置決め(第1報)

システムの構成と粗・微動制御

抄録

A one-axis stage mechanism, driven by an AC linear motor and guided by a rolling ball guide, has been constructed. Non-contact drive and position-sensing are adopted. The dynamic characteristics of the stage are different in different displacement regions. Two different controls are designed for coarse and fine positioning by using different dynamic characteristics. A coarse positioning with 100 nm resolution, 200 mm/s maximum velocity and 250 mm stroke, and a fine positioning with better than 1 nm resolution without backlash are achieved. The switching from the coarse positioning to the fine positioning is studied.