粗さ測定のための走査型トンネル顕微鏡 (STM) に関する研究
スキッド式STMについて
1992 年 58 巻 9 号 p. 1509-1514
詳細
1992 年 58 巻 9 号 p. 1509-1514
A new type of STM instrument, named skid-type STM is proposed and a test instrument has been constructed. In the test instrument, two skid-styluses and a measuring stylus are set in a line so that the measuring one is equi-distant from both skids, and the specimen is moved by a 2-dimensional inch-worm mechanism. It is shown that the z-directional errors due to thermal drift and the scanning motion of the inch worm stage can be reduced to 1/10 in the skid-type STM. Although the influence of environmental vibration has not been sufficiently reduced yet and smoothing effect by the trial skid-stylus is not quite enough for specimens like gratings, a possibility of making an STM with a very large scanning area is shown.
