Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Recent Progress in the Field of Ultra-high Vacuum Technology
Hazime SHIMIZU
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Keywords: ultra-high vacuum (UHV), extreme high vacuum (XHV), atom counting technology, XHV measurement, laser ionization
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1993 Volume 59 Issue 1 Pages 42-47

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