精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
変形解析に基づくラッピングフィルムの研磨挙動に関する研究
ラッピングフィルムによるセラミックスの研磨
樋口 静一易 宏偉斎藤 義夫花岡 忠昭
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ジャーナル フリー

1994 年 60 巻 9 号 p. 1252-1257

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This paper describes the finishing performance of lapping films based on deformation analysis of their constituents by using the Finite Element Method (FEM). The models applied to the FEM were varied by changing polyester film backing thickness, bond thickness, shape of abrasive grain and size of grain of lapping film, supposing that different types of lapping films are used in the actual finishing processes. And, the effects of them and the elastic characteristics of bond on the deformation characteristics were also estimated. As a result, the behavior of abrasive grains in the contact area between the lapping film and workpiece became clear. Furthermore, experiments on the cylindrical ceramic workpiece surface finishing, utilizing lapping films coated diamond abrasive grains, were carried out and the effects of finishing conditions on stock removal and finished surface roughness were examined. From the experimental results, it was confirmed that the experimental characteristics could be explained clearly by the obtained results of FEM analysis.

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