精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
ダイヤモンド単粒によるガラスの超高速研削
高橋 正行上田 修治黒部 利次
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1994 年 60 巻 9 号 p. 1294-1298

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Shear mode grinding has recently much attention for the machining of brittle material such as a glass, ceramics and silicon. This study presents the effects of a newly developed ultra high speed grinder, which can achieve speeds five times greater than conventional grinders. Scratching modes on a surface of glass ground with a single point diamond were observed in detail by scanning tunnel microscopy. It was found from the experiments that the grinding mode depends exceedingly upon the circulating speed of the disc. The depth of cut observed with STM was about 20-30% smaller than calculated one. Grinding mode changes due to the shape of stylus tip and the cut of depth is influenced by crossing of the scratches.

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