精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
斜入射X線ミラー用超精密研削加工機の開発
鈴木 弘新野 康生村上 慎二難波 義治
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1994 年 60 巻 9 号 p. 1309-1313

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In order to fabricate grazing incidence X-ray mirrors made of hard and brittle CVD-SiC, a large 5 axis control ultra-precision grinding machine has been developed. The machine must be capable of generating non-axisymmetric aspheric surfaces by ductile grinding. So as to obtain precise profile accuracy, new mechanisms such as flexible coupling, guide rails with fine deformation mechanism and leveling blocks for correcting warp of guide rails are applied to hydrostatic linear slideways. As experimental results, excellent straightness of X axis slide of 0.05 μm in a 500mm traverse is obtained on the grinding machine. Non-axisymmetric aspheric mirrors have been ground within a profile error of 0.9μm with the machine.

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