精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
圧電素子を用いた高剛性多自由度微動機構
大岩 孝彰金子 克金子 毅久曽神 煌
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1994 年 60 巻 9 号 p. 1355-1359

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In this paper, a new five-degrees-of-freedom fine motion mechanism whose rigidity is high is proposed, and the construction and the experimental results are also described for the characteristics of newly developed three-degrees-of-freedom mechanism. This mechanism comprises three wedge-shaped plates and six multi-layered piezoelectric actuators. The mechanism which requires neither guide plane nor lubrication enables it to move without any friction, wear and badklash. The maximum movements of the stage were 3 μm in X-direction, 12μm in Z-direction and 12 second of arc in β-direction. The positioning resolutions in the translational and rotational directions were less than 0.01μm and 0.01 second of arc, respectively. The loading capacity was 400N. The positioning errors and the motion error were less than ±0.01μm and ±0.03 second of arc. 1 μm step positioning in X-direction interfered with other directions transiently because of difference of the contraction and expansion velocities of the piezoelectric actuators.

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