精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
光学式内径測定器の開発
光学的解析,基礎実験,試作および性能試験
鬼鞍 宏猷桑原 義治中村 泰三佐島 隆生今関 義朗甲木 昭雄山田 靖二
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1995 年 61 巻 2 号 p. 248-252

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An optical hole-diameter measuring instrument has been developed. The instrument, which consists of two laser diodes, one photo sensitive detector, two condenser lenses and some mirrors, is intended to measure, based on trigonometry, the distances to the hole wall on two sides alternately. The optical, fundamental analysis and experiment showed that it was possible to measure the distances to the object having not only a mirror-like plane surface but also a rough, cylindrical surface such as a drilled one. Using the instrument, which was manufactured on trial, it was found that the width between block gages and the hole diameter of a ring gage could be measured within the accuracy of 10μm and that it was influenced by the position of the measuring probe and the inclination of the measured object. The deviation from the desired values may be attributed to the impropriety of calibration, the misalignment of irradiation of two laser beams and the nonlinearity of optical and electrical elements.
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