Walking Driveによる精密送り機構の開発 (第2報)

速度制御法と超精密位置決めシステムの開発

抄録

This paper presents a method to control feed velocity of precision feed devices driven by means of walking drive, and ultraprecision positioning is realized by a laser feedback controller developed. It is confirmed that the feed velocity can be controlled easily and simply by the method presented. Major results obtained are as follows ; (1) Positioning accuracy of 5 nm is realized, because of no friction against the feed motion. (2) Smooth continuous path control is realized despite short strokes of the piezoelectric actuators. (3) High stiffness of about 40 N/μm is realized in the feed direction.