摩擦駆動式マイクロ圧電リニアアクチュエータの研究

グリップ式圧電リニアアクチュエータの推力特性

抄録

This paper reports study on a very small linear actuator which can have big force, long stroke and precise positioning capability. Although the actuator is driven by multilayer piezoelectric devices in cyclic way, small displacement is continuously transmitted to a slider through friction drive method. The spring plates which are fixed on both sides of the slider press the actuator grip points and the pressing force generates friction drive force. The maximum pressing force under which the actuator can work normally is calculated by FEM analysis. As a result, the actuator with an appropriate structure is designed, fabricated and experimentally evaluated. The factors which give effects to thrust force characteristics are studied.