精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
位相シフト実体格子型モアレ法による形状計測
小寺 豊金 蓮花大谷 幸利吉澤 徹
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1999 年 65 巻 10 号 p. 1456-1460

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Precise profile measurement has been required in various fields such as industrial fields and medical fields. For such a request, a measurement method using moiré technique has been proposed. In this research, for profile measurement of objects, shadow moiré topography using phase shifting technique is proposed. However, in shadow moiré topography, shifting phase of moiré pattern regardless of fringe orders is not easy because fringe interval varies according to the fringe order. A trial to shift a phase constantly regardless of fringe orders is proposed by giving vertical movement and rotation to the grating. Availability of this technique is justified by a simulation test and some experimental results reveal the verification of this research.

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