Metal Film Formation of Nanometer Thickness Using MBE Apparatus

Abstract

The new functional materials have been studied to apply to micro machines or electronic devices. However in order to develop new materials, it is indispensable to control the film thickness of nano-meter or sub-nanometer and to deposit the fine film of the same roughness as substrate surface. This paper describes the experimental results, the possibility to fabricate metal films of nanometer order thickness and to synthesize new materials of multilayer structure using the Knudsen-cell in the high vacuum MBE chamber. The structure of the films was analyzed by X-ray diffraction.