Abstract
A technology for improving the measurement accuracy for the surfacq roughness of 3-diatat is east metals, using an optical noncontact method is studied in this work. In particular, the technology to maintain a constant evemga output value is because values obtained using the optical method depend significantly on the average output value of detected images.It is clarified theoretically and experimentally that the average output value depends not only on the surface reflectivity and illuminance but also on the ounce roughness and inclination. An image detection sensor with 2 optical filters is developed and the number of digitized signals is increased from 256 levels to 1024 levels using this image detection sensor. This technology, uses software to maintain a constant average output value of detected images without the saturation of the output value.As a result, the linear between the surface roughness and the value obtained using the optical method, and the measurement sccyracy are improved,