精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
圧電素子を用いた多軸微小送り機構
古谷 克司末冨 彰毛利 尚武
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1999 年 65 巻 12 号 p. 1778-1782

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This paper deals with a linear drive mechanism for multiple shaft feeding. Though various small linear drive mechanisms have been developed, they are used to feed single shaft. A unit for multiple shaft feeding has been developed by arranging some feeding devices for single shaft. The proposed feeding device consists of clamps, friction devices for each shaft and a driver. Each shaft can be fed forward or backward direction and can be stationary in a cycle. The feeding principle is investigated by using a device for single shaft feeding. Then a device for three shaft feeding is manufactured in trial. The shafts can be driven up to 100 Hz with a constant displacement. The displacement of the shaft is linearly changed over 20 V as the amplitude of the applied voltage to the driver. This mechanism performs similarly to an inchworm mechanism. However, the proposed device needs less number of actuators than the inchworm mechanism because the driver is commonly used for all shafts and the friction device needs no actuator. This mechanism will be applied to a machining unit for the dot-matrix electrical discharge machining.

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