アルミナ微粒子噴射による表面形状変化

抄録

This paper describes geometric change of the substrate surface when Al₂O₃ particles of 0.5μm diameter, which is larger than ions and smaller than the particles used in blasting and soon, were jetted on the copper, steels and glass. As Al₂O₃ particles were jetted at a jet angle of 0°, vertically on the surface, Al₂O₃ particles were deposited on the substrate surface except glass substrate. As jet angle increased, ripple spacing perpendicular to the jet direction with spacing about 2-15 u m was generated on each material and that spacing grows larger with the increase in the jet angle. The spacing varies in the material and harder material shows the tendency to become smaller in the spacing. The ripple spacing grows rapidly larger with the increase in the jet angle. At a jet angle of 80°, the trace which appears in the removed surface along the jet direction becomes remarkable. That was applicable to polishing of the fine pipe.