精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
半導体レーザを用いた段差を持つ粗面の形状計測
3波長での位相測定を用いる方法
安達 正明北川 洋一松本 哲也稲部 勝幸
著者情報
ジャーナル フリー

65 巻 (1999) 3 号 p. 418-422

詳細
PDFをダウンロード (533K) 発行機関連絡先
抄録

The authors propose a new method which can measure a shape of rough step like surface by means of a speckle interferometry with a wavelength-changeable laser. A speckle phase available in the interferometry is usually affected not only by an optical path difference but also by a random component associated with surface roughness. The phase shifting method using two different wavelengths (λ1, λ2) is, therefore, limited to a single phase map about the optical path difference, because of the random component which remains without cancel. The single phase map is available only for the calculation of the shape of a continuous surface. In the proposed method, the authors use three different wavelengths (λ1, λ2, λ3) to obtain a double phase map, which is capable of a discontinuous surface shape calculation by means of a fringe-counting two-wavelength method. The validity of the method is experimentally demonstrated and discussion is extended to an accuracy of the measurement and an extent of the measurement range.

著者関連情報
© 社団法人 精密工学会
前の記事 次の記事

閲覧履歴
feedback
Top