Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Advanced Techniaues of Thin Films
Yoichi MURAYAMA
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Keywords: thin film, plasma, ion plating, MBE, sputtering
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2000 Volume 66 Issue 4 Pages 505-510

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