精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
ナノCMMレーザトラッピングプローブに関する研究(第1報)
3次元位置検出の基本原理
高谷 裕浩佐藤 憲章高橋 哲三好 隆志清水 浩貴渡辺 万次郎
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2000 年 66 巻 7 号 p. 1081-1086

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This paper discusses a new probe technique, the so-called laser trapping probe, whose principle is based on the dynamic properties of optically trapped dielectric particles and the Linnik microscope interferometer. Computer simulations for trapping in air and theoretical analysis for interference fringe patterns are performed. By using the newly developed laser trapping probe experimental system, single-beam gradient-force optical traps of silica particles with the diameter of 8.0μm as microprobes are successfully demonstrated in air. And then, positional detection principle is established based on fringe changes with small displacement of the laser trapped probe sphere while approximating it to work surfaces. Measurement results for glass microspheres having NIST traceable mean diameter of 168±8.4μm show its potentials as the 3D nano-position sensing probe for nano-CMM.

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