パータン照明を用いたフィルム表面凹凸欠陥の検出

抄録

A new detective method for small convex and concave defects, which are observed in surfaces of optical films, have been proposed. The method is based on a phenomenon that regular patterns in a reflected image is blurred by the existences of their defects under an illumination having regular patterns. An algorithm to extract only blurred zones as defective zones is shown. The method is applied to defects on several sample films. The results show that only defects are successfully detected even if the films are curved and warped dynamically. Also the effectiveness of the method in manufacturing sites is shown by the robustness against the fluctuation of intensity of the illumination and executing time.