CVDダイヤモンド膜の表面粗さに及ぼす砥石速度の影響

抄録

This paper describes the influence of grinding speed on the surface roughness of CVD diamond. Polycrystalline CVD diamond films coated on the ceramics pieces was ground by vitrified bonded diamond wheel of #1500. The surface roughness of CVD diamond films decreases from 0.14μmRmax to 0.07μmRmax when the wheel speed at grinding point increases from 314m/min to 1570 m/min. The temperature at grinding point was estimated. Relation between the temparature at grinding point and the surface roughness od CVD diamond films was linear. The temperature was over 750°C when the surface roughness was 0.07, μmRmax.