窒化法と溶射法により製作した湿式光センサー用TiO2電極の特性
2001 年 67 巻 3 号 p. 413-417
詳細
2001 年 67 巻 3 号 p. 413-417
This papre describes the electrode characteristics of TiO2 electrode manufactured by the flame spraying. The thermal spraying flame of the high temperature hits the substrate at the flame spraying, and the oxidizing zone of the high resistivity rate forms on the surface. Therefore, the electrode characteristics decrease remarkably by the voltage drop. To prevent the oxidizing zone being formed, nitride processed the substrate by PVD method and the direct nitriding method. As a result, it was clarified that the electrode characteristics improve by the nitride processing.
