零点補正型差動レーザオートコリメーションに関する研究

抄録

This paper presents a new differential laser auto-collimation method that can remove the influence of zero point difference.Surface profile measurement methods that detect the second differential of a surface, such as the 3-point method and differential laser auto-collimation(DLAC), are effected by the zero point difference of the sensors. We have developed a zefo point compensation method for DLAC with a simple mechanism that required only the rotation of one polarized beam splitter. TwoDLAC systems with zero point compensation were made. Measurement range and accuracy of the first system as an inclination of a measured surface were 30' and ±5" in the worst case, respectively. Those of the second system were 10' and ±3". The comparison between the measured results obtained by the proposed method and those obtained by another method that used sampled data of one beam and the pitching data of an auto-collimator showed the usefulness of this zero point compensation.