精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
CVDダイヤモンドドリルの単結晶Si穴あけ加工への適用
亀岡 誠司増田 敬早崎 浩本西 英内田 仁
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2002 年 68 巻 10 号 p. 1362-1366

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Cutting performances of CVD (Chemical Vapor Deposition) diamond coated drills for brittle materials such as single-crystal Si or silicon carbide ceramics were investigated. For drilling of single-crystal Si, only a mere wear of CVD diamond film around the cutting edges was observed, but damage of cutting edges was dominated by chipping. Chipping performances were affected by shape of drill, the chipping of the cutting edges were repressed for the drills with large web thickness and long tool life were obtained. On the other hand, for drilling of silicon carbide, severe wear of CVD diamond film was observed. Major cutting edge showed "knife edge shape". These phenomena are very characteristic as compared with conventional carbide drills.

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