2002 年 68 巻 11 号 p. 1450-1454
One laser beam, which has Gaussian power distribution, is usually used for laser lithography. The solidification area is also a hyperbolic shape in this system. Thus, the surface of built parts is not smooth and a post-process to reduce surface roughness, using sandpaper and other methods, is required. In this research, we propose a laser lithography method using two laser beams. The second laser beam is used for complimenting the subtracted area from the CAD model and the solidification area of the first laser beam. From the experiment, we verified surface roughness for building truncated pyramid shapes was reduced using our system.