精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
リニアモータ駆動テーブルのモデル規範型フィードフォワード制御による高速位置決め
宮河 秀和山本 暁洋浜松 弘住本 正後藤 聡中村 政俊
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2002 年 68 巻 7 号 p. 977-983

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In mechatronics systems driven by linear motors, performance of high speed and high accuracy motion compared to that driven by rotation motors is required. This paper describes a control method to achieve high speed positioning of linear motor driving table. The proposed method is based on the model reference feedforward control with the vibration model of the linear motor. In this proposed method, the reference model of FF control is derived from the rotational vibration caused by the inertia of the table and the stiffness of the bearing. The novelty of the proposed method is that the torque, velocity and position command in order to achieve the high speed and high accuracy motion of the reference model are regarded as the additional input in the feedback control. The effectiveness of the proposed method was assured by experimental results of XY linear motor driving table. The result showed that the settling time can be reduced 60% by the proposed method compared with that by P-PI and Velocity FF control generally used in industry. The proposed method can be easily adjusted for control parameters of actual machines, because the parameters in the reference model can be identified by the measurement of the transfer function in the XY linear motor driving table.

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