抄録
This paper focuses on a development of a cortical signal recording system to analyze an information processing system in a brain, and describes a fabricated microprobe using techniques of the microfabrication for realizing a multi-site recording. In order to identify the brain system, the multi-site and simultaneous recording is required. However, the property of the invasiveness leads to miniaturizing such a device. Therefore, the multi-site microprobe was fabricated by applying a multilayer structure of electrical circuits. Moreover, the anisotropic etching was applied in order to simplify the fabrication process. And the electrical property of this microprobe was described.
