Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Tribology in Micromachine
Motohisa HIRANO
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Keywords: microtribology, nanotribology, micromachine, MEMS, micromotor, digital Micromirror devia
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2005 Volume 71 Issue 9 Pages 1078-1083

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