Journal of the Japan Society of Powder and Powder Metallurgy
Online ISSN : 1880-9014
Print ISSN : 0532-8799
ISSN-L : 0532-8799
Review
Liquid Phase Patterning of Ceramic Films
Yoshitake Masuda
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JOURNAL OPEN ACCESS

2007 Volume 54 Issue 12 Pages 854-862

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Abstract
Liquid Phase Patterning (LPP) of ceramic thin films were realized in the solutions using self-assembled monolayers (SAMs). The processes were developed based on scientific knowledge obtained from investigations of interactions and chemical reactions between functional groups of SAMs and ions, clusters and homogeneously nucleated particles in solutions. Several conceptual processes for LPP using SAMs as templates were proposed, and nano/micropatterns of ceramic thin films such as TiO2, Fe3O4, ZnO, etc. were successfully fabricated. The studies showed the good performance of environment-friendly chemistry for the fabrication of nano/micro ceramic devices.
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© 2007 by Japan Society of Powder and Powder Metallurgy

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