Liquid Phase Patterning of Ceramic Films

Abstract

Liquid Phase Patterning (LPP) of ceramic thin films were realized in the solutions using self-assembled monolayers (SAMs). The processes were developed based on scientific knowledge obtained from investigations of interactions and chemical reactions between functional groups of SAMs and ions, clusters and homogeneously nucleated particles in solutions. Several conceptual processes for LPP using SAMs as templates were proposed, and nano/micropatterns of ceramic thin films such as TiO₂, Fe₃O₄, ZnO, etc. were successfully fabricated. The studies showed the good performance of environment-friendly chemistry for the fabrication of nano/micro ceramic devices.