粉体および粉末冶金
Online ISSN : 1880-9014
Print ISSN : 0532-8799
ISSN-L : 0532-8799
研究
垂直MRAM用スピン偏極増強用FeCo層およびMgOバリア層の結晶性向上
大森 秀人羽鳥 友哉中川 茂樹
著者情報
ジャーナル オープンアクセス

2008 年 55 巻 2 号 p. 116-120

詳細
抄録
Rare-earth-transition metal (RE-TM) alloy films, such as TbFeCo and GdFeCo layers were used as perpendicularly magnetized layers for pinned and free layers in a perpendicular magnetic tunneling junction (p-MTJ). (100) oriented MgO tunneling barrier layer can be deposited on (100) oriented Fe (and FeCo) buffer layers. The (100) texture of the Fe (and FeCo) layers were enhanced by depositing them on the RE-TM layers. X-ray diffraction study clarified that MgO layers deposited on the Fe (and FeCo) layers revealed apparent (100) orientation at the early stage of the film growth. 3nm-thick MgO layer deposited on GdFeCo(100nm)/Fe(3nm) exhibited (100) texture.
著者関連情報
© 2008 一般社団法人粉体粉末冶金協会

本論文はCC BY-NC-NDライセンスによって許諾されています.ライセンスの内容を知りたい方は,https://creativecommons.org/licenses/by-nc-nd/4.0/deed.jaでご確認ください.
https://creativecommons.org/licenses/by-nc-nd/4.0/deed.ja
前の記事 次の記事
feedback
Top