Magnetic properties of iron nitride thin films as well as Fe4N/Fe multilayered films prepared by a reactive plasma deposition method have been investigated. The Fe4N single phase was produced under PN2=4mTorr, substrate temperature=above 300°C and output power of r.f. generator=above 300W.
The multilayered films consisting of Fe/Fe4N/Fe as well as Fe4N/Fe/Fe4N were deposited by control-ling the plasma power. The saturation magnetization of the multilayered films mainly depended on the thickness of the Fe layers. The coercive force of the films was greater than that of the Fe single phase because of nitrogen from the Fe4N layer was diffused into the Fe layer. The film, of a small coercive force of 29 Oe, containing little nitrogen in the Fe layer was made when the deposition rate of the iron in the Fe4N/Fe/Fe4N multilayered film became speeded up.