Eighteen tracks two layers thin film write head using all dry process has been developed for the magnetic tape drive system. Production process has all dry process performed by sputtering and ion milling process repeatedly. At the smoothing process two kinds of resists were used and 200Å maximum step was observed. Front taper angle controlled between 30 degrees to 45 degrees. We developed the material for full write by using Co-Nb-Zr-Ta amorphous alloy having high Bs(Bs=12000 Gauss). Co-Nb-Zr-Ta amorphous film has been sputtered by Bias Sputtering. AYA-2L (Active Yoke by Amorphous-2 Layer) head has been developed as enhanced all dry write head.
