抄録
Crystal structure and magnetic properties of sputter-deposited Fe-Si-N films were investigated. Structure of Fe-Si-N films had single phase of a-Fe, but films with higher N content had two phases consisting of a-Fe and γ'-Fe4N. Coercivity (Hc) lower than 1 Oe was obtained in α-Fe single phase. Permeability (μ) was found to be strongly related to the substrate temperature (Tsub) during deposition. For example, the deposition at Tsub=230°C gave rise to μ=3600 at 10 MHz, while Tsub=room temp. resulted in μ< 100 at 10 MHz. These highμ were obtained in the films of α-Fe single phase, in which the microcrystalline with (111), plane orientation exised. Furthermore, high thermal stability of permeability was found to be obtained in the films with high Si concentration.
