Fe-Ti-M (M=Al, Si, Co) 合金薄膜の構造と軟磁気特性

抄録

  The magnetic and structural properties of sputtered Fe-Al-Ti, Fe-Si-Ti, and Fe-Co-Ti ternary films were investigated. The samples were annealed at 673 K for one hour. The crystal structures were bcc for the Fe-Si-Ti and Fe-Co-Ti ternary films, and a mixture of bcc and bcc+Fe₂Ti for the Fe-Al-Ti ternary films. The addition of Ti reduces the grain size to a minimum of about 10 nm. Addition of Al, Si, or Ti to Fe reduces the saturation magnetic flux density for Fe-Al-Ti and Fe-Si-Ti films, and addition of Co increases the saturation magnetic flux density for Fe-Co-Ti. Zero magnetostriction samples were obtained for each ternary system. Low coercivity (less than 5 Oe) and high initial permeability (about 1000) were obtained with zero magnetostriction for Fe-Al-Ti ternary films by adding a small amount of Ti. For Fe-Co-Ti ternary films, low coercivity and high permeability were obtained with a small grain size of about 10 nm. For films with low magnetostriction (λ_s<3×10^-6), the coercivity was roughly proportional to the third power of the grain diameter.